The VFT vacuum fiber optic feedthrough of Shanghai Wenyi Optoelectronic Technology Co., Ltd. is a device that connects optical fibers in a vacuum chamber, such as plasma monitoring. The vacuum fiber optic feedthrough includes an M12 screw with a Viton type sealing ring and 2 SMA fiber optic connectors, which can be easily connected to the fiber optic probe (two additional SMA905 fiber optic adapters need to be ordered). Matching various types of vacuum tubes with all core diameters of optical fibers, ranging from 9µmUp to 1000µmAnd there are UV 200~1100nm and IR 400~2500nm wavelength models available, which can also be customized according to customer requirements.
Overview of VFT Vacuum Fiber Optic Feedthrough
The VFT vacuum fiber optic feedthrough provided by Wenyi Optoelectronics can import or export light into or out of the vacuum chamber to achieve ultra-high vacuum applications, such as optical monitoring in semiconductor processing and final detection of thin film adsorption.
It has good performance in isolated boxes and high-pressure applications, with a maximum vacuum degree of 10 ^ -7 mbar and an operating temperature of 200 ° C (customized up to 300 ° C).
The vacuum chamber requires a wall thickness of 5-40 mm, and a circular hole with a diameter of 12mm can be opened on the chamber. Pay attention to the smooth and scratch free side that is closely attached to the O-ring.
By using metal or glass cavities with high smoothness, the performance of VFT in ultra-high vacuum applications can be improved.
The VFT fiber optic vacuum device is not only used in semiconductor and thin film processing, but also an ideal tool for environmental monitoring, pharmaceutical processing, and optical coating production. It can also be applied in molecular beam epitaxy and vapor adsorption in chemical physics, and can serve as an excellent conduit for use with isolation boxes, glove boxes, and medium pressure devices.
The high and low voltage terminals of VFT vacuum fiber optic feedthrough can be connected to SMA905 connectors, which can be easily used together with optical fibers, light sources, accessories, as well as our company's spectrometers and other optical equipment.
The VFT vacuum fiber optic feedthrough has an M12 external thread, which can be directly screwed onto the cavity with the M12 threaded hole, or can be screwed into a smooth hole with a prepared nut and washer. The assembly process is very simple, just connect the fiber optic and VFT vacuum fiber optic through a SMA905 fiber optic adapter. On the low voltage side of the sample chamber, we recommend that users choose quartz optical fibers with metal sheaths as matching.
VFT vacuum fiber feedthrough has fiber diameters of 9 μ m, 50 μ m, 100 μ m, 200 μ m, 400 μ m, 600 μ m, and 1000 μ m to choose from; The wavelength can be selected from UV200~1100nm and IR400~2500nm, and can be equipped with SMA905 or FC connectors.
Order selection | |||
model | Core Jing | Wavelength Range | Connector |
Multi mode step quartz fiber | |||
VFT-50-UV | 50 µm | Deep UV 200-1100nm | SMA905 (customizable) |
VFT-50-IR | 50 µm | Near infrared 380~2500nm | |
VFT-100-UV | 100 µm | Deep UV 200-1100nm | |
VFT-100-IR | 100 µm | Near infrared 380~2500nm | |
VFT-200-XSR | 200 µm | UV resistant 185~1100nm | |
VFT-200-IR | 200 µm | Near infrared 380~2500nm | |
VFT-400-XSR | 400 µm | UV resistant 185~1100nm | |
VFT-400-IR | 400 µm | Near infrared 380~2500nm | |
VFT-600-XSR | 600 µm | UV resistant 185~1100nm | |
VFT-600-IR | 600 µm | Near infrared 380~2500nm | |
VFT-800-UV | 800 µm | Deep UV 200-1100nm | |
VFT-800-IR | 800 µm | Near infrared 380~2500nm | |
VFT-1000-UV | 1000 µm | Deep UV 200-1100nm | |
VFT-1000-IR | 1000 µm | Near infrared 380~2500nm | |
Single mode fiber SM | |||
VFT-SMF9-xx | 9.2 ± 0.4 µm | 1200~1700nm | FC/PC or FC/APC (customizable) |
VFT-SM650-xx | 3.6 - 5.3 µm | 600~800nm | |
VFT-SM780-xx | 5.0 ± 0.5 µm | 750~1000nm | |
VFT-SM850-xx | 4.7 - 6.9 µm | 800~1000nm | |
Multi mode gradient optical fiber MMF | |||
VFT-MM50-xx | 50/125 µm | 800~1700nm | FC/PC or FC/APC (customizable) |
VFT-MM62.5-xx | 62.5/125 µm | 800~1700nm | |
Options | |||
Temperature range for use | -30 °~+200 ° (HT high temperature can reach 300 °) | ||
Adapter | Each vacuum device needs to be equipped with 2 adapters corresponding to the connectors |
Optional accessories
The VFT fiber optic vacuum device can be customized with matching vacuum flanges, such as KF16, KF25, KF40, etc
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